CRYO HEXAPOD POSITIONING SYSTEM (CHPS)

Cryo Hexapod with high dynamic stability

CONFIGURATION

FEATURES

6 DOF motion, parallel kinematics
High internal resonances
Position insensitive to temperature fluctuations
Coarse motion using Cryo Linear Actuators
Scanner integrated
Stiff static reference frame integrated
20 mK to 375K, vacuum compatible
Materials: titanium, aluminium, stainless
Cryo Optical Encoder on each coarse axis

DESCRIPTION

The Cryo Hexapod Positioning System (CHPS) is a 6 DoF positioning stage developed for use in a cryo-vacuum environment. Parallel kinematics result in a light and stiff stage with high internal resonance frequencies. This makes the sample table position insensitive to ground vibrations. Coarse and fine actuation in series gives the CHPS millimeter range, (sub-)nm resolution, high stability and dynamic positioning performance. Symmetry makes the table position highly insensitive to thermal fluctuations. Each leg is fitted with an optical encoder for controlled motion.

SPECIFICATIONS
specsunitCHPS
SYSTEM SPECIFICATIONS
Active axes-6
Type of motion-x, y, z, Rx, Ry, Rz
System range linear*mmx / y / z approx. ± 1.6 / ±1.6 / ±0.9
System range angular*degRx / Ry / Rz approx. ±3.5 / ±3.5 / ±8
Coarse actuator-CLA2601
Scanning actuator-Piezo ceramic
Endstops-± 0.8mm, in each leg
Main construction material-Titanium, aluminium, stainless steel
1st natural frequency @ 20gr loadkHzxy> 0.6 / z>1.3
Massgrams1300
Load capacitygrams200
ACTUATOR SPECIFICATIONS
Specifications are given for individual actuators/legs unless otherwise mentioned.
See interface drawing for transformation matrix from actuator outputs to system motion.
Coarse rangemm± 0.8
Scan range @ 293 Kµm2.5
Scan range @ 4 Kµm0.5
Coarse step size @ 293 Knm5-25
Coarse step size @ 4 Knm1-5
Scanner sensitivity @ 293 Knm/V25
Scanner sensitivity @ 4 Knm/V5
Operating temperatureK0.02-375
Coarse actuator spindle pitchmm/turn0.25
Coarse actuator encoder resolution**PPR850
DRIVE ELECTRONICS
Controller/driver-CAB-230(115), CADM2
Encoder readout-OEM2
Scanner module-PSM, PSMIL
* Max range per degree of freedom, while keeping the other degrees of freedom at zero
** Linear resolution can be found by dividing the spindle pitch by PPR (pulses per revolution)

Ordering Information

 CHPS Cryo Hexapod Positioning System incl. Scanner and Cryo Optical Encoders

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