DEVELOPMENT: NANO STEPPER HEXAPOD UHV

Hexapod for High Vacuum and Ultra Clean environments with completely sealed NSAU actuators

CONFIGURATION

DESCRIPTION

Janssen Precision Engineering is currently developing a Hexapod system for Ultra High Vacuum positioning applications, especially set & forget applications. For this the 6 DOF stage has 6 JPE’s Nano Stepper Actuators (NSAU’s). These actuators comprise a nanometric resolution and can be equipped with incremental or even absolute encoders. For more information about these actuators click here.

INFORMATION

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RENDERED ANIMATION