NANO STEPPER ACTUATOR UHV (NSAU)

Completely sealed linear motor with nanometer resolution

CONFIGURATION

FEATURES

 UHV compatible (completely sealed)
Contamination free (no particle generation)
 Welded stainless steel construction
 Suited for harsh environments (dust)
 Nanometer resolution
 Absolute positioning
 Push-pull load capacity, large stroke: 10 mm
 Self-locking (set-and-forget)
Compatible with industrial motion systems

DESCRIPTION

The Nano Stepper Actuator (NSAU) is a completely sealed linear actuator developed for highly accurate positioning in Ultra High Vacuum (UHV) or UItra Clean Environments. A stepper motor combined with a high quality reduction and ball screw offers backlash free nanometer resolution and high load capacity. Electrical limit switches and motor temperature sensing are standard integrated and the absolute encoder offers the user high resolution position feedback and absolute position information, even after a power-off.

SPECIFICATIONS
specsunitNSAU-010A
ACTUATOR SPECIFICATIONS
Active axes-1
Type of motion-x
Rangemm10
Max. velocitymm/s0.1
Step resolution nominalnm50 (full step)
Step resolution bestnm2.5 (20x micro stepping)
Repeatability-2 x step resolution
Accuracy full strokeµm6 (IT5)
Backlashmnone
Axial load capacityN± 300
Radial load capacityN5% of actual axial load
Axial stiffnessN/m2e7
Masskg1.0
Vacuum compatibility-UHV
Bake-out temperature °C<80
Stepper motor-2 phase, bipolar
Max current / phaseA<0.8
Resistance / phaseΩ5.4
Inductance / phasemH1.5
Limit switches-Normally open, switch to GND
Thermal sensor-Pt1000, keep below 80 ° C
Encoder voltageVDC4.75-5.5
Encoder current, typicalA0.08
Encoder resolution *12 bit ST
12 bit MT
2,44nm/count
Encoder interfaceSSI, RS485/RS422 compatible
DRIVE ELECTRONICS
Controller-CAB-230(115), NCM1
* ST is SingleTurn resolution, counts per revolution
MT is MultiTurn resolution, the number of countable revolutions

Ordering Information

 NSAU-010A Base product: Nano Stepping Actuator UHV, absolute encoder

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