Linear stage for allround applications in a cryo-vacuum environment.



 Spring preloaded roller guides, full ceramic
 Horizontal and vertical motion
 xy configurable without additional brackets
 High dynamical stability
 Compact and robust design with large stroke
 Integrated small stroke scanner functionality
20 mK to 375K, vacuum compatible
 Materials: titanium, bronze, ceramics


The Cryo Bearing Stage (CBS) is a linear stage for all-round applications in a cryo-vacuum and will run both horizontally and vertically. The combination of long range stepping motion and short range scanning offers nm positioning over the full range. The use of non-magnetic materials allows operation in high magnetic fields. It is equipped with high performance full ceramic linear roller guides for maximum stiffness and mechanical stability. The guides are spring preloaded, ensuring consistent performance with play free and smooth running from ambient to cryogenic temperatures.

Active axes-1
Type of motion-Linear, any orientation
Coarse/scanning actuator *-Piezo ceramic
Coarse Rangemm10
Speed @ ambientmm/s3
Speed @ 4Kmm/s1
Min. step size @ ambientnm150
Min. step size @ 4Knm50
Scan Range @ ambientµm8
Scan Range @ 4Kµm 1.6
Scanner sensitivity @ ambient **nm/V66
Scanner sensitivity @ 4K **nm/V13
Driving force @ ambientN2
Driving force @ 4KN1
Load capacitykg2
Mechanical endstops-at begin and end of range
Operating temperatureK0.02-375
Main construction material-Titanium, bronze, ceramic
Controller/driver-CAB-230(115), CADM2
Sensor readout-N/ARSM
* Coarse/scan positioning is both done with the CADM2, not simultaneously
** CADM2 0-150V, 10 bits resolution, setpoint rate approx. 10Hz

Ordering Information

 CBS10 Cryo Bearing Stage, 10mm range
CBS10-RLS CBS10 incl. Resistive Linear Sensor
I1-CBS10 Interface bracket for adding z axis on x or xy

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CBS in operation in cryo

Cryo Testing